CTDS – 4 channels, 1 tunnel, 8 chemicals /pump per chemical/
Technical specifcation:
- 8 Pneumatic Pump (no limit)
- Control Cabinet
- 8 Flow meters (depends on the number of pumps)
- Unlimited number of chemicals
- Air flush (option)
Pump:
- NEW PFA type process pump (High corrosion resistance)
- Long service life. Diaphragms are made from denatured PTFE for superior resistance and longer service life
- Type: automatically or air operated
- Fluid: IPA, pure water, methyl ethyl ketone-hypochlorous acid soda
- Pilot air pressure: 0.2 to 0.5MPa
- Service life: 20 million cycles (or 12 months)
Valves:
- Manifold base for high purity chemical valve
- Stacking type manifold
- Common IN/Individual OUT
- Diaphragm (PTFE)
- Outstanding corrosion resistance. Compatible with chemicals such as acids, bases and ultra-pure water
CTDS – 4 channels, 1 tunnel, 10 chemicals
Technical specifcation:
- 8 Pneumatic Pump (no limit)
- Control Cabinet
- 8 Flow meters (depends on the number of pumps)
- Unlimited number of chemicals
- Air flush (option)
Pump:
- NEW PFA type process pump (High corrosion resistance)
- Long service life. Diaphragms are made from denatured PTFE for superior resistance and longer service life
- Type: automatically or air operated
- Fluid: IPA, pure water, methyl ethyl ketone-hypochlorous acid soda
- Pilot air pressure: 0.2 to 0.5MPa
- Service life: 20 million cycles (or 12 months)
Valves:
- Manifold base for high purity chemical valve
- Stacking type manifold
- Common IN/Individual OUT
- Diaphragm (PTFE)
- Outstanding corrosion resistance. Compatible with chemicals such as acids, bases and ultra-pure water